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XWG-CNC Series Semiconductor 3D Tester

Equipment principle and purpose

Working principle of the equipment:Through the principle of opticalmetallographic image magnification, the product is subjected to highmagnification microscopic inspection, and the product results are analyzed andjudged. The equipment has a high-resolution color camera to improve its videoanalysis and measurement performance; it makes measurement simple andfully utilizes the measurement hardware performance of 3D spatial functions.It combines an easy-to-use user interface and powerful software computingcapabilities to bring reliable Z-axis precise measurement output andperformance.

Equipment use:High-power 3D image inspection instruments are widely usedin high-precision inspection industries such as semiconductor chips, packaging,LCD circuit boards, magnetic materials, and printed circuit boards (circuitboards, PCBs).

Technical Parameter

Model XWG200-CNC XWG300-CNC
XYZ Measure range(mm) 200*200*150mm 300X200X150
Dimension(mm) 767*1093*1520 970x1490x1520
Glass table size(mm) 270*270 370X370
Machine Weight(kg) 260 300
Max Load(kg) 25
Optical magnification 6-50X
Video magnification(24 inch display) 332X-2770X
XZ axis measure accuracy(um) 1.8+L/250
XY repeatability(um) 1.8
Z axis accuracy(um) 2.5+L/250
Z repeatability (um) 3
Machine move speed XY axis:100mm/S  Z axis:20mm/S
Environment requirement Temperature 20±2 ℃,Humidity ≦2℃/hr
Power supply AC220-240V、50Hz、1200W

Machine configuration

Item Name Part Specification
1 Machine

Host

Mechanical structure granite main structure, small expansion coefficient, stable physical properties
2 Working table Cast iron material, stable physical properties
3 Linear scale Germany“RSF”0.1um metal scale
4 Guideway Cross Roller Guides
5 Screw Taiwan TBI ball screw
6 Optical system Camera 2/3 inch 5M pixel digital color CCD(USB3.0)
7 Optical Lens 0.6-5.0X auto lens with coaxial light +

10X Olympus long working distance objective

8 Video magnification 332X- 2770X (24 inch display)
9 View field

(without 10X olympus)

12.3*9.3mm(0.6X)-1.5*1.1mm(5.0X)
10 Transmitted light Spherical integral parallel light path LED transmission light source (255 levels arbitrarily adjustable)
11 Coaxial light LED cold light source(white light)(5V 10W)
12 Electronic control system

 

Controller  XW-300
13 3 axis motor Japan “Panasonic” high-performance AC servo motor (drive closed loop)
14 Joystick XW-A
15 Software Measure software   PolyGaugeFully automatic metallographic measurement software
16 PC Pc host Lenovo I5-12 generation CPU, 256G hard drive, 16G memory, 4G independent graphics card, 24-inch monitor
17 Accessory Calibration block Photolithography standard element calibration block
18 Factory certificate Factory certificate
19 Factory inspection report XW factory inspection report
20 Hardware manual Hardware manual, software manual
21 Optional Metallographic lens    5X、20X、50X

Chans Vision’s Engineers are inspection specialists, qualified to evaluate your measurement requirements and recommend the solution that best fits your needs.

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